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HOW
SEM WORKS |
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To further understand how an SEM works, we must begin with the electrons. In a light microscope, light from a source (usually an incandescent light) is focused through lenses onto the sample. The image is formed when the sample reflects and absorbs different wavelengths of this light which is detected by our eyes and formed into an image by our brains. An electron microscope works in a similar fashion. Electrons from a source are focused on the sample. These electrons reflect off the sample (As will be explained later, these electrons don't really reflect off the sample, but for now, let's assume they do), they are then picked up by an electron detector and then processed into an image which is projected onto a CRT that our eyes can see. To begin our understanding
of how an SEM works, let's begin with the source of electrons, the electron
gun.Most SEMs have what is called a hot cathode source,
usually a tungsten filament similar to that in an incandescent light bulb.
When such a filament is heated by passing current through it, it not only
emits light, but an electron cloud forms around the filament. Left
on their own, they remain in the cloud and are reabsorbed into the filament
when the current is removed.
The electron cloud is attracted to the anode plate enough that they will travel through the hole in the cathode. But in doing so, they gain enough speed that most of them travel right through the hole in the anode plate. Now we have an electron gun. The speed of the electrons
emitted from this gun is controlled by the amount of potential (accelerating
voltage) applied to the cathode and anode plates. 3
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